辐照硅中振动频率与VO/sub /缺陷的相关性

N. Sarlis, C. A. Londos, L.G. Fytros
{"title":"辐照硅中振动频率与VO/sub /缺陷的相关性","authors":"N. Sarlis, C. A. Londos, L.G. Fytros","doi":"10.1109/SMICND.1997.651549","DOIUrl":null,"url":null,"abstract":"This paper reports infrared spectroscopy studies on oxygen related defects in Czochralsky grown neutron irradiated Silicon material subsequently submitted to heat treatment. The sequential formation of various VO/sub n/ (n=1,2,3,4) defects according to the reaction process VO/spl rarr/VO/sub 2//spl rarr/VO/sub 3//spl rarr/VO/sub 4/ is investigated. We argue that on increasing the annealing temperature different sites for the addition of oxygen atoms become available, triggering for n>2 two parallel formation sequencies in relation with VO/sub 3/ and VO/sub 4/ defects. Thus in the first sequence the oxygen atoms are added in adjacent sites to VO/sub 2/ defect although in the second sequence the oxygen atoms are added in the same vacant site of VO/sub 2/ defect.","PeriodicalId":144314,"journal":{"name":"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-10-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Correlations of vibrational frequencies with VO/sub 4/ defect in irradiated silicon\",\"authors\":\"N. Sarlis, C. A. Londos, L.G. Fytros\",\"doi\":\"10.1109/SMICND.1997.651549\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports infrared spectroscopy studies on oxygen related defects in Czochralsky grown neutron irradiated Silicon material subsequently submitted to heat treatment. The sequential formation of various VO/sub n/ (n=1,2,3,4) defects according to the reaction process VO/spl rarr/VO/sub 2//spl rarr/VO/sub 3//spl rarr/VO/sub 4/ is investigated. We argue that on increasing the annealing temperature different sites for the addition of oxygen atoms become available, triggering for n>2 two parallel formation sequencies in relation with VO/sub 3/ and VO/sub 4/ defects. Thus in the first sequence the oxygen atoms are added in adjacent sites to VO/sub 2/ defect although in the second sequence the oxygen atoms are added in the same vacant site of VO/sub 2/ defect.\",\"PeriodicalId\":144314,\"journal\":{\"name\":\"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings\",\"volume\":\"44 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-10-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.1997.651549\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.1997.651549","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

本文报道了热处理后中子辐照硅材料中氧相关缺陷的红外光谱研究。研究了VO/spl rarr/VO/sub 2//spl rarr/VO/sub 3//spl rarr/VO/sub 4/反应过程中各种VO/sub n/ (n=1,2,3,4)缺陷的顺序形成。我们认为,随着退火温度的升高,不同的氧原子加入位点变得可用,触发n>2与VO/sub 3/和VO/sub 4/缺陷相关的两个平行形成序列。因此,在第一序列中,氧原子被添加到VO/sub - 2/缺陷的相邻位点上,尽管在第二序列中,氧原子被添加到VO/sub - 2/缺陷的相同空位上。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Correlations of vibrational frequencies with VO/sub 4/ defect in irradiated silicon
This paper reports infrared spectroscopy studies on oxygen related defects in Czochralsky grown neutron irradiated Silicon material subsequently submitted to heat treatment. The sequential formation of various VO/sub n/ (n=1,2,3,4) defects according to the reaction process VO/spl rarr/VO/sub 2//spl rarr/VO/sub 3//spl rarr/VO/sub 4/ is investigated. We argue that on increasing the annealing temperature different sites for the addition of oxygen atoms become available, triggering for n>2 two parallel formation sequencies in relation with VO/sub 3/ and VO/sub 4/ defects. Thus in the first sequence the oxygen atoms are added in adjacent sites to VO/sub 2/ defect although in the second sequence the oxygen atoms are added in the same vacant site of VO/sub 2/ defect.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信