{"title":"辐照硅中振动频率与VO/sub /缺陷的相关性","authors":"N. Sarlis, C. A. Londos, L.G. Fytros","doi":"10.1109/SMICND.1997.651549","DOIUrl":null,"url":null,"abstract":"This paper reports infrared spectroscopy studies on oxygen related defects in Czochralsky grown neutron irradiated Silicon material subsequently submitted to heat treatment. The sequential formation of various VO/sub n/ (n=1,2,3,4) defects according to the reaction process VO/spl rarr/VO/sub 2//spl rarr/VO/sub 3//spl rarr/VO/sub 4/ is investigated. We argue that on increasing the annealing temperature different sites for the addition of oxygen atoms become available, triggering for n>2 two parallel formation sequencies in relation with VO/sub 3/ and VO/sub 4/ defects. Thus in the first sequence the oxygen atoms are added in adjacent sites to VO/sub 2/ defect although in the second sequence the oxygen atoms are added in the same vacant site of VO/sub 2/ defect.","PeriodicalId":144314,"journal":{"name":"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-10-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Correlations of vibrational frequencies with VO/sub 4/ defect in irradiated silicon\",\"authors\":\"N. Sarlis, C. A. Londos, L.G. Fytros\",\"doi\":\"10.1109/SMICND.1997.651549\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports infrared spectroscopy studies on oxygen related defects in Czochralsky grown neutron irradiated Silicon material subsequently submitted to heat treatment. The sequential formation of various VO/sub n/ (n=1,2,3,4) defects according to the reaction process VO/spl rarr/VO/sub 2//spl rarr/VO/sub 3//spl rarr/VO/sub 4/ is investigated. We argue that on increasing the annealing temperature different sites for the addition of oxygen atoms become available, triggering for n>2 two parallel formation sequencies in relation with VO/sub 3/ and VO/sub 4/ defects. Thus in the first sequence the oxygen atoms are added in adjacent sites to VO/sub 2/ defect although in the second sequence the oxygen atoms are added in the same vacant site of VO/sub 2/ defect.\",\"PeriodicalId\":144314,\"journal\":{\"name\":\"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings\",\"volume\":\"44 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-10-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.1997.651549\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.1997.651549","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Correlations of vibrational frequencies with VO/sub 4/ defect in irradiated silicon
This paper reports infrared spectroscopy studies on oxygen related defects in Czochralsky grown neutron irradiated Silicon material subsequently submitted to heat treatment. The sequential formation of various VO/sub n/ (n=1,2,3,4) defects according to the reaction process VO/spl rarr/VO/sub 2//spl rarr/VO/sub 3//spl rarr/VO/sub 4/ is investigated. We argue that on increasing the annealing temperature different sites for the addition of oxygen atoms become available, triggering for n>2 two parallel formation sequencies in relation with VO/sub 3/ and VO/sub 4/ defects. Thus in the first sequence the oxygen atoms are added in adjacent sites to VO/sub 2/ defect although in the second sequence the oxygen atoms are added in the same vacant site of VO/sub 2/ defect.