集成电路开发和制造的成品率管理

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) Pub Date : 1998-09-23 DOI:10.1109/ASMC.1998.731555

H. Koyama, M. Inokuchi

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引用次数: 0

摘要

本文的目的是概述产量管理方法的战略要素，用于开发和制造先进的ULSI电路。介绍了有关知识转换的基本思想和详细的产量管理系统。

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Yield management for development and manufacture of integrated circuits

The purpose of this paper is to outline a strategic element of yield management methodologies for the development and fabrication of advanced ULSI circuits. Fundamental ideas with regard to knowledge conversion and a detailed yield management system are described.

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来源期刊

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)

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