MEMS陀螺仪有限元建模与仿真

2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES) Pub Date : 2018-06-01 DOI:10.23919/MIXDES.2018.8436827

J. Nazdrowicz, M. Szermer, A. Stawinski, A. Napieralski

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引用次数: 2

摘要

本文对微机电系统陀螺仪的三维模型进行了分析。在非常流行的COMSOL Multiphysics软件中对三维结构进行了有限元分析。作者特别关注该装置的机械性能，特别是梳子(用于静电致动器和传感器)的驱动和传感方向。对于进一步的静电分析(本文未涉及)，该分析具有重要意义，因为梳子结构在运行过程中的任何变形都会影响静电致动和传感的质量。本文在感应方向上进行了应力结果和变形分析，在驱动方向上也得到了类似的结论。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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MEMS Gyroscope FEM Modeling and Simulation

This paper the analysis of a 3D model of MEMS Gyroscope is presented. The FEM analysis of the 3D structure has been performed in very popular COMSOL Multiphysics software. Authors took particular attention on mechanical behaviour particular parts of this device especially combs (used in electrostatical actuators and sensors) in drive and sense directions. For further electrostatic analysis (which is not covered in this article) this analysis has enormous meaning because any deformation of comb structure during operation influences on quality of electrostatic actuating and sensing. In this paper author performed stress results and deformation analysis in sense direction, however similar conclusions one can be drawn for drive direction.

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来源期刊

2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES)

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