{"title":"啁啾光栅透镜性能的基本衍射极限","authors":"J. Delavaux, W. Chang","doi":"10.1364/igwo.1984.thd3","DOIUrl":null,"url":null,"abstract":"Although highly efficient chirped grating lenses have been reported[1−7], their performance that will combine high efficiency η with large angular field of view Δθ or high η with low F-number is limited by the phase distortion in the diffraction process and by fabrication tolerances. In this paper, we will show how the coupling coefficient Kc and the minimum periodicity Λmin will limit the lens performance (i.e. η, Δθ and F). The efficiency is also sensitive to the variation of the line width to space width ratio obtained in the lithographic process. However, it is insenstive to the position accuracy of the individual grating grooves.","PeriodicalId":208165,"journal":{"name":"Seventh Topical Meeting on Integrated and Guided-Wave Optics","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fundamental Diffraction Limits of the Performance of Chirped Grating Lenses\",\"authors\":\"J. Delavaux, W. Chang\",\"doi\":\"10.1364/igwo.1984.thd3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Although highly efficient chirped grating lenses have been reported[1−7], their performance that will combine high efficiency η with large angular field of view Δθ or high η with low F-number is limited by the phase distortion in the diffraction process and by fabrication tolerances. In this paper, we will show how the coupling coefficient Kc and the minimum periodicity Λmin will limit the lens performance (i.e. η, Δθ and F). The efficiency is also sensitive to the variation of the line width to space width ratio obtained in the lithographic process. However, it is insenstive to the position accuracy of the individual grating grooves.\",\"PeriodicalId\":208165,\"journal\":{\"name\":\"Seventh Topical Meeting on Integrated and Guided-Wave Optics\",\"volume\":\"21 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Seventh Topical Meeting on Integrated and Guided-Wave Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/igwo.1984.thd3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Seventh Topical Meeting on Integrated and Guided-Wave Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/igwo.1984.thd3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fundamental Diffraction Limits of the Performance of Chirped Grating Lenses
Although highly efficient chirped grating lenses have been reported[1−7], their performance that will combine high efficiency η with large angular field of view Δθ or high η with low F-number is limited by the phase distortion in the diffraction process and by fabrication tolerances. In this paper, we will show how the coupling coefficient Kc and the minimum periodicity Λmin will limit the lens performance (i.e. η, Δθ and F). The efficiency is also sensitive to the variation of the line width to space width ratio obtained in the lithographic process. However, it is insenstive to the position accuracy of the individual grating grooves.