Chip-scale scalar atomic magnetometer operating in geomagnetic environment

Chip-scale scalar atomic magnetometers (CSAMs) generally measure the magnitude of the magnetic field independent of orientation. In most cases CSAM can achieve high sensitivity (pT/Hz1/2) in the magnetic field ranged from 1000nT–5000nT. In our previous presentation in ECTC 2016, CSAMs were demonstrated with a considerable sensitivity of 40pT/Hz1/2 in the magnetic field of 4000nT. However, some applications including geomagnetic mapping, geomagnetic anomalies require CSAM operating on the condition of geomagnetic environment, 20000nT–100000nT. CSAM working in geomagnetic environment remains a challenge for its low sensitivity. This paper presents a novel design of CSAM working in 20000nT–100000nT as well as its system integration. MEMS and system integration technology have been used to demonstrate the CSAM measuring the magnetic anomalies in geomagnetic environment. The details of the detection theorem and the fabrication methods of CSAM have been explored.