使用增强灵敏度厚度剪切模式装置的有机蒸汽传感和鉴别

R.D. Williams, S. Cular, V. Bhethanabotla
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摘要

采用聚异丁烯(PIB)薄膜涂层在96 MHz TSM谐振器上作为高灵敏度有机蒸汽传感器。市售的at -石英TSM器件被铣削至17 μ m,形成由50 μ m厚的外环包围的薄石英膜。所研究的有机蒸汽是苯、甲苯、己烷、环己烷、庚烷、二氯乙烷、二氯甲烷和氯仿,其气相体积百分比从0.2到13.7不等。采用Butterworth-VanDyke (BVD)等效电路模型对受摄动和未受摄动TSM谐振器进行了建模。通过等效电路模型监测传感器响应,以便区分有机蒸汽。将96 MHz设备的各种传感器参数(如灵敏度、基线噪声和漂移、检测极限、响应和恢复时间、动态范围和可重复性)的详细结果与10和20 MHz设备的结果进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Organic vapor sensing and discrimination using enhanced sensitivity thickness shear mode devices
Thin film coatings of poly-isobutylene (PIB) on 96 MHz TSM resonators were utilized as high sensitivity organic vapor sensors. Commercially available AT-quartz TSM devices were milled to 17 µm, leading to a thin quartz membrane surrounded by a 50 µm thick outer ring. The organic vapors studied were benzene, toluene, hexane, cyclohexane, heptane, dichloroethane, dichloromethane, and chloroform at levels ranging from 0.2 to over 13.7 volume percentage in the vapor phase. The Butterworth-VanDyke (BVD) equivalent circuit model was used to model both the perturbed and unperturbed TSM resonators. Monitoring the sensor response through the equivalent circuit model allowed for discriminating between the organic vapors. Detailed results for various sensor parameters such as sensitivity, baseline noise and drift, limit of detection, response and recovery times, dynamic range, and repeatability for the 96 MHz device were compared with those for 10 and 20 MHz devices.
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