定位因子在原子力显微镜检测锡氧化中的应用

2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging (SIITME) Pub Date : 2015-10-01 DOI:10.1109/SIITME.2015.7342289

A. Bonyár

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引用次数: 1

摘要

本文的目的是通过原子力显微镜(AFM)成像，证明一种称为定位因子的新参数用于锡表面氧化的检测和监测。在受控环境下，对先前抛光过的无氧化物锡表面进行氧化处理，并利用原子力显微镜对表面形貌进行数值评价。结果表明，得到的局部化系数值与表面的结构变化，即氧化晶粒的发育有很好的相关性。

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Application of localization factor for the detection of tin oxidation with AFM

The aim of this paper is the demonstration of a novel parameter called localization factor for the detection and monitoring of tin surface oxidation through atomic force microscope (AFM) imaging. A previously polished and oxide free tin surface was oxidized in a controlled environment and the resulting surface topography was evaluated numerically with AFM. Results indicate that the obtained localization factor values correlate well with the structural changes of the surface, namely with the development of the oxide grains.

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来源期刊

2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging (SIITME)

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