损耗为1db的压电盘弯曲谐振器

2016 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2016-05-09 DOI:10.1109/FCS.2016.7546788

R. Rudy, J. Pulskamp, S. Bedair, J. Puder, R. Polcawich

{"title":"损耗为1db的压电盘弯曲谐振器","authors":"R. Rudy, J. Pulskamp, S. Bedair, J. Puder, R. Polcawich","doi":"10.1109/FCS.2016.7546788","DOIUrl":null,"url":null,"abstract":"Disk-flexure PZT-on-silicon resonators exhibited peak |S21| of 1 dB with insertion loss of 0.92 dB. Ferroelectric tuning of bandwidth (>50%), and coupling (>35%), are demonstrated with an insertion loss penalty of 0.6 dB. Power handling measurements showed less than 1 dB compression up to the +15 dBm limit of the network analyzer. The disk-flexure resonator was monolithically integrated with length extension resonators, allowing for varied coupling and quality factor with similar insertion loss, and figure of merit in the same wafer.","PeriodicalId":122928,"journal":{"name":"2016 IEEE International Frequency Control Symposium (IFCS)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Piezoelectric disk flexure resonator with 1 dB loss\",\"authors\":\"R. Rudy, J. Pulskamp, S. Bedair, J. Puder, R. Polcawich\",\"doi\":\"10.1109/FCS.2016.7546788\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Disk-flexure PZT-on-silicon resonators exhibited peak |S21| of 1 dB with insertion loss of 0.92 dB. Ferroelectric tuning of bandwidth (>50%), and coupling (>35%), are demonstrated with an insertion loss penalty of 0.6 dB. Power handling measurements showed less than 1 dB compression up to the +15 dBm limit of the network analyzer. The disk-flexure resonator was monolithically integrated with length extension resonators, allowing for varied coupling and quality factor with similar insertion loss, and figure of merit in the same wafer.\",\"PeriodicalId\":122928,\"journal\":{\"name\":\"2016 IEEE International Frequency Control Symposium (IFCS)\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-05-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE International Frequency Control Symposium (IFCS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/FCS.2016.7546788\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Frequency Control Symposium (IFCS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FCS.2016.7546788","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 14

摘要

圆盘弯曲PZT-on-silicon谐振器的峰值|S21|为1 dB，插入损耗为0.92 dB。铁电调谐带宽(>50%)和耦合(>35%)，插入损耗损失为0.6 dB。功率处理测量显示，在网络分析仪的+15 dBm限制下，压缩小于1 dB。圆盘弯曲谐振器与长度扩展谐振器集成在一起，允许不同的耦合和质量因子具有相似的插入损耗，并且在同一晶圆中具有相同的性能值。

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Piezoelectric disk flexure resonator with 1 dB loss

Disk-flexure PZT-on-silicon resonators exhibited peak |S21| of 1 dB with insertion loss of 0.92 dB. Ferroelectric tuning of bandwidth (>50%), and coupling (>35%), are demonstrated with an insertion loss penalty of 0.6 dB. Power handling measurements showed less than 1 dB compression up to the +15 dBm limit of the network analyzer. The disk-flexure resonator was monolithically integrated with length extension resonators, allowing for varied coupling and quality factor with similar insertion loss, and figure of merit in the same wafer.

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2016 IEEE International Frequency Control Symposium (IFCS)

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