利用微滴热毛细效应驱动光学微镜

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI:10.1109/MEMSYS.2009.4805553

R. K. Dhull, I. Puchades, L. Fuller, Y. W. Lu

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引用次数: 3

摘要

本文提出了一种利用表面张力梯度引起液滴变形并使微物体倾斜的简单方法。利用热毛细效应、马兰戈尼效应和接触角滞后控制液滴的形状和位置。该装置由放置在微滴上的微孔板组成，在30v下驱动时可以产生6.5°的倾斜角度。它显示了在扫描微镜和显示技术方面的潜在应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Optical Micromirror Actuation using Thermocapillary Effect in Microdroplets

This paper presents a simple means that utilizes surface tension gradient to cause droplet deformation, and to tilt micro-objects. Thermocapillary or Marangoni effect, and contact angle hysteresis are employed to control the droplet shape and position. The device consists of a microplate placed onto a microdroplet, and can produce a 6.5° tilting angle when actuated at 30 V. It shows the potential applications in scanning micromirror and display technology.

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来源期刊

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

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