弹性平衡面内振动微陀螺仪

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) Pub Date : 2000-07-11 DOI:10.1109/IMNC.2000.872674

Hyung-Taek Lim, Yong-Kweon Kim, J. Song, Jang-Gyu Lee

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摘要

本文报道了一种采用优化后的双框架机械解耦结构的振动式微机械陀螺仪的设计和实验结果。在4 mTorr的真空压力下，测量范围为/spl plusmn/150°/sec，陀螺仪的线性度误差小于0.574%。等效噪声密度为0.002度/秒//spl径向/Hz，等效噪声率小于0.005度/秒。偏置稳定在小于0.02度/秒的等效速率之间。

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Elastically gimbaled in-plane vibrating microgyroscope

This paper reports about the design and experimental results of the vibrating micromachined gyroscope that is designed to mechanically decoupled structure with optimized two gimbals. The gyroscope is characterized by a low linearity error of less than 0.5744% full scale for a measured range of /spl plusmn/150 deg/sec under vacuum pressure of 4 mTorr. The equivalent noise density is 0.002 deg/sec//spl radic/Hz and the equivalent noise rate is less than 0.005 deg/sec. The bias is stabilized between equivalent rate of less than 0.02 deg/sec.

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Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)

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