金属化薄膜上键合触点的寿命

H. Hieber, K. Pape
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引用次数: 2

摘要

金梁和金线被微焊接在硅晶圆上稳定的金/铂/钛薄膜夹层上。触点同时承受热载荷和机械载荷。根据蠕变-裂纹扩展机理,对所测断裂时间进行了分析。蠕变断裂方程以应力指数和塑性流的热激活能作为材料特性参数。断裂时间受梁和导线的织构以及焊接接触的几何形状的强烈影响。该方程可用于300 ~ 650K温度区间内的外推。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Lifetime of Bonded Contacts on Thin Film Metallizations
Gold beams and wires are microwelded to a stable gold/platinum/titanium thin-film sandwich on silicon wafers. The contacts are subjected to simultaneous thermal and mechanical loads. The measured times-to-fracture are analyzed by mechanisms of creep-crack propagation. A creep rupture equation contains the stress exponent and the thermal activation energy of plastic f low as the material-specific parameters. The time-to-fracture is strongly affected by the texture of the beams and wires and by the geometry of the welded contact. The equation can be used for extrapolation in a temperature interval between 300 and 650K.
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