高性能无掺杂p隧道场效应晶体管的设计与仿真

F. Bashir, S. Loan
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引用次数: 2

摘要

本文提出了一种新型的p型无掺杂隧道场效应晶体管(DL-p-TFET)。提出的DL-p-TFET器件不使用传统的离子注入或扩散来实现源极和漏极;这些区域是通过使用具有不同功函数的金属来创建的,这是一种电荷等离子体概念。通过优化DL-p-TFET器件的源极和栅极间隙(Lgap, S)和源电极下的氧化物厚度(oxide, S),可以获得比传统掺杂p-TFET器件(D-p-TFET)更好的性能。2D仿真研究表明,与传统的D-p-TFET相比,该器件在ON电流(Ion)、截止频率(fT)和亚阈值斜率(SS)方面有显著改善。结果表明,与传统的D-p-TFET相比,DL-p-TFET中的离子、fT和SS分别增加了156%、2.5%和133%。由于所提出的设备是无掺杂的,它没有随机掺杂波动问题,可以在低温下加工。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design and simulation of a high performance dopingless p-tunnel field effect transistor
In this paper, we propose a novel p-type dopingless tunnel field effect transistor (DL-p-TFET). The proposed DL-p-TFET device does not use conventional ion implantation or diffusion for realizing source and drain regions; these regions are created by using metals of different work function, a charge plasma concept. It has been observed that by optimizing the source and gate electrode gap (Lgap, S) and oxide thickness under source electrode (Toxide, S) in the proposed DL-p-TFET device, better performance can be obtained in comparison to the conventional doped p-TFET (D-p-TFET). The 2D simulation study has shown a significant improvement in ON current (Ion), cutoff frequency (fT) and subthreshold slope (SS) in the proposed device in comparison to the conventional D-p-TFET. It is found observed that the ION, fT and SS in the proposed DL-p-TFET are increased by 156%, 2.5% and 133%, respectively, in comparison to the conventional D-p-TFET. Since the proposed device is dopingless, it is free from random dopant fluctuations issues and can be processed at low temperatures.
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