利用硅载体表征高达40 GHz的倒装芯片微连接

C. Patel, P. Andry, K. Jenkins, B. Dang, R. Horton, R. Polastre, C. Tsang
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引用次数: 2

摘要

本文报道了使用硅载流子的细间距倒装芯片互连(称为微连接)的电特性。直径为50 /spl mu/m,间距为100 /spl mu/m的微连接被组装在硅载体上,并使用传输线测试宏进行高达40 GHz的表征。单个直径50 /spl mu/m的微连接的时域和频域测量提供6 ps延迟和小于-0.5 dB的传输损耗,高达40 GHz。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of flip chip microjoins up to 40 GHz using silicon carrier
Electrical characterization results of fine pitch flip chip interconnections, called microjoins, using a silicon carrier are reported. Microjoins with 50 /spl mu/m diameter, 100 /spl mu/m pitch are assembled onto a silicon carrier and characterized up to 40 GHz using transmission line test macros. Time and frequency domain measurements of a single 50 /spl mu/m diameter microjoin give 6 ps delay and less than -0.5 dB transmission losses up to 40 GHz.
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