{"title":"经典抛光熔融二氧化硅表面非均匀性的激光诱导击穿光谱研究(会议报告)","authors":"C. Gerhard","doi":"10.1117/12.2537878","DOIUrl":null,"url":null,"abstract":"In this contribution, the surface uniformity of classically-manufactured fused silica windows was investigated via laser-induced breakdown spectroscopy. It is shown that for all investigated samples a comparatively high aluminium content was found at the edge of the surface with respect to its centre. This contamination can be attributed to residues from lapping and polishing agents and leads to a mentionable non-uniformity of the surface in terms of chemical composition and optical properties, respectively.","PeriodicalId":334783,"journal":{"name":"Optical Measurement Systems for Industrial Inspection XI","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of non-uniformity of classically polished fused silica surfaces via laser-induced breakdown spectroscopy (Conference Presentation)\",\"authors\":\"C. Gerhard\",\"doi\":\"10.1117/12.2537878\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this contribution, the surface uniformity of classically-manufactured fused silica windows was investigated via laser-induced breakdown spectroscopy. It is shown that for all investigated samples a comparatively high aluminium content was found at the edge of the surface with respect to its centre. This contamination can be attributed to residues from lapping and polishing agents and leads to a mentionable non-uniformity of the surface in terms of chemical composition and optical properties, respectively.\",\"PeriodicalId\":334783,\"journal\":{\"name\":\"Optical Measurement Systems for Industrial Inspection XI\",\"volume\":\"10 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-08-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Measurement Systems for Industrial Inspection XI\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2537878\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Measurement Systems for Industrial Inspection XI","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2537878","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Investigation of non-uniformity of classically polished fused silica surfaces via laser-induced breakdown spectroscopy (Conference Presentation)
In this contribution, the surface uniformity of classically-manufactured fused silica windows was investigated via laser-induced breakdown spectroscopy. It is shown that for all investigated samples a comparatively high aluminium content was found at the edge of the surface with respect to its centre. This contamination can be attributed to residues from lapping and polishing agents and leads to a mentionable non-uniformity of the surface in terms of chemical composition and optical properties, respectively.