{"title":"基于mems的高q Fabry-Perot滤波器","authors":"Yu‐Sheng Lin, Chengkuo Lee","doi":"10.1109/OMN.2014.6924596","DOIUrl":null,"url":null,"abstract":"The design, fabrication, and characterization of a tunable in-plane MEMS-based Fabry-Perot (FP) filter with hybrid integration of the grating and slot structures are presented. Antireflection grating (ARG) is designed at the inner wall of the FP resonator to enhance the performance of a tunable FP filter. Attributed to the ARG structures, the light can be propagated effectively through the FP resonator. The experimental result shows a low driving voltage electrostatically tuned the device with a wide mechanical tuning range (more than 1600 nm with 4 V) and a high Q-factor (9762).","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"276 1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"MEMS-based high-Q Fabry-Perot filters\",\"authors\":\"Yu‐Sheng Lin, Chengkuo Lee\",\"doi\":\"10.1109/OMN.2014.6924596\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The design, fabrication, and characterization of a tunable in-plane MEMS-based Fabry-Perot (FP) filter with hybrid integration of the grating and slot structures are presented. Antireflection grating (ARG) is designed at the inner wall of the FP resonator to enhance the performance of a tunable FP filter. Attributed to the ARG structures, the light can be propagated effectively through the FP resonator. The experimental result shows a low driving voltage electrostatically tuned the device with a wide mechanical tuning range (more than 1600 nm with 4 V) and a high Q-factor (9762).\",\"PeriodicalId\":161791,\"journal\":{\"name\":\"2014 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"276 1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2014.6924596\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2014.6924596","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The design, fabrication, and characterization of a tunable in-plane MEMS-based Fabry-Perot (FP) filter with hybrid integration of the grating and slot structures are presented. Antireflection grating (ARG) is designed at the inner wall of the FP resonator to enhance the performance of a tunable FP filter. Attributed to the ARG structures, the light can be propagated effectively through the FP resonator. The experimental result shows a low driving voltage electrostatically tuned the device with a wide mechanical tuning range (more than 1600 nm with 4 V) and a high Q-factor (9762).
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