VHDL-AMS模型对MEMS音叉陀螺仪的机械元件进行原理图级计算机辅助设计

2008 International Conference on Perspective Technologies and Methods in MEMS Design Pub Date : 2008-05-21 DOI:10.1109/MEMSTECH.2008.4558762

A. Holovatyy, M. Lobur, V. Teslyuk

{"title":"VHDL-AMS模型对MEMS音叉陀螺仪的机械元件进行原理图级计算机辅助设计","authors":"A. Holovatyy, M. Lobur, V. Teslyuk","doi":"10.1109/MEMSTECH.2008.4558762","DOIUrl":null,"url":null,"abstract":"Iii the paper VHDL-AMS model for computer- aided design of MEMS tuning fork gyroscope has been created. The created model allows to model drive and sense vibrations, variations of Coriolis acceleration, capacitance and current changes of the device depending on the applied angular velocity, and also to make its functioning analysis on the schematic level of computer- aided design.","PeriodicalId":265845,"journal":{"name":"2008 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"65 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"VHDL-AMS model of mechanical elements of MEMS tuning fork gyroscope for the schematic level of computer-aided design\",\"authors\":\"A. Holovatyy, M. Lobur, V. Teslyuk\",\"doi\":\"10.1109/MEMSTECH.2008.4558762\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Iii the paper VHDL-AMS model for computer- aided design of MEMS tuning fork gyroscope has been created. The created model allows to model drive and sense vibrations, variations of Coriolis acceleration, capacitance and current changes of the device depending on the applied angular velocity, and also to make its functioning analysis on the schematic level of computer- aided design.\",\"PeriodicalId\":265845,\"journal\":{\"name\":\"2008 International Conference on Perspective Technologies and Methods in MEMS Design\",\"volume\":\"65 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-05-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 International Conference on Perspective Technologies and Methods in MEMS Design\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSTECH.2008.4558762\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 International Conference on Perspective Technologies and Methods in MEMS Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSTECH.2008.4558762","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

摘要

建立了微机电系统音叉陀螺仪计算机辅助设计的VHDL-AMS模型。所建立的模型可以模拟驱动和感知振动，科里奥利加速度的变化，器件的电容和电流随应用角速度的变化，并在计算机辅助设计的原理图层面上进行功能分析。

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VHDL-AMS model of mechanical elements of MEMS tuning fork gyroscope for the schematic level of computer-aided design

Iii the paper VHDL-AMS model for computer- aided design of MEMS tuning fork gyroscope has been created. The created model allows to model drive and sense vibrations, variations of Coriolis acceleration, capacitance and current changes of the device depending on the applied angular velocity, and also to make its functioning analysis on the schematic level of computer- aided design.

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2008 International Conference on Perspective Technologies and Methods in MEMS Design

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