双极器件沟槽隔离方案——优点和局限性

{"title":"双极器件沟槽隔离方案——优点和局限性","authors":"H. Goto, K. Inayoshi","doi":"10.1007/978-3-642-74360-3_4","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":347756,"journal":{"name":"ESSDERC '87: 17th European Solid State Device Research Conference","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1987-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Trench Isolation Schemes for Bipolar Devices --- Benefits and Limiting Aspects\",\"authors\":\"H. Goto, K. Inayoshi\",\"doi\":\"10.1007/978-3-642-74360-3_4\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":347756,\"journal\":{\"name\":\"ESSDERC '87: 17th European Solid State Device Research Conference\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1987-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ESSDERC '87: 17th European Solid State Device Research Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/978-3-642-74360-3_4\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ESSDERC '87: 17th European Solid State Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-642-74360-3_4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}