{"title":"它是","authors":"Hang Guo, A. Lal","doi":"10.1109/SENSOR.2003.1215247","DOIUrl":null,"url":null,"abstract":"This paper presents theoretical and experimental studies on betavoltaic microbatteries using low-level radiation from 1/spl sim/100 milliCurie /sup 63/Ni thin films. The model indicates that powers of hundred nanowatts are possible with 50-100 milliCurie radioisotope sources. Two types of betavoltaic microbatteries are developed and tested. One is the planar silicon pn-diode with electroplating of /sup 63/Ni thin film, and the other is the bulk micromachined pn-junction structure with the inverted pyramid array. The obtained power is on the scale of one-nanowatt with an open circuit voltage of 128 millivolts, and a short circuit current of 2.86 nA. The output power can be increased using greater activity and efficient collector designs.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"78","resultStr":"{\"title\":\"Nanopower betavoltaic microbatteries\",\"authors\":\"Hang Guo, A. Lal\",\"doi\":\"10.1109/SENSOR.2003.1215247\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents theoretical and experimental studies on betavoltaic microbatteries using low-level radiation from 1/spl sim/100 milliCurie /sup 63/Ni thin films. The model indicates that powers of hundred nanowatts are possible with 50-100 milliCurie radioisotope sources. Two types of betavoltaic microbatteries are developed and tested. One is the planar silicon pn-diode with electroplating of /sup 63/Ni thin film, and the other is the bulk micromachined pn-junction structure with the inverted pyramid array. The obtained power is on the scale of one-nanowatt with an open circuit voltage of 128 millivolts, and a short circuit current of 2.86 nA. The output power can be increased using greater activity and efficient collector designs.\",\"PeriodicalId\":196104,\"journal\":{\"name\":\"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-06-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"78\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2003.1215247\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2003.1215247","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper presents theoretical and experimental studies on betavoltaic microbatteries using low-level radiation from 1/spl sim/100 milliCurie /sup 63/Ni thin films. The model indicates that powers of hundred nanowatts are possible with 50-100 milliCurie radioisotope sources. Two types of betavoltaic microbatteries are developed and tested. One is the planar silicon pn-diode with electroplating of /sup 63/Ni thin film, and the other is the bulk micromachined pn-junction structure with the inverted pyramid array. The obtained power is on the scale of one-nanowatt with an open circuit voltage of 128 millivolts, and a short circuit current of 2.86 nA. The output power can be increased using greater activity and efficient collector designs.