MOS器件辐射效应的简化模型

L. Sambuco Salomone, A. Faigón
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引用次数: 0

摘要

暴露于电离辐射的MOS栅极氧化物中捕获空穴的空间分布在阈值电压随剂量变化的动力学中起着重要的作用,特别是当考虑开关偏置测量时。在这项工作中,我们分析了目前可用的简化模型,强调了它们在处理复杂测量时的局限性。因此,我们提出了一个基于物理数值模型的阱洞空间分布演化随剂量拟合的简化模型。为此,考虑了带有四个拟合参数的双指数表达式。然后,考虑了这些参数随剂量的变化。为了更好地理解MOS器件中的辐射效应,并有助于建立能够再现复杂动力学的简化数值模型,本文分析了捕获率和中和率的变化对捕获空穴空间分布的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Simplified model for radiation effects in MOS devices
The spatial distribution of trapped holes in the gate oxide of MOS exposed to ionizing radiation plays a significant role in the dynamics of the threshold voltage shift with dose, specially when switched bias measurements are considered. In this work, we analyze currently available simplified models stressing out their limitations when dealing with complex measurements. Therefore, we present a simplified model based on the fitting of the evolution with dose of the spatial distribution of trapped holes obtained from a physics-based numerical model. For that, a two-exponential expression was considered, with four fitting parameters. Then, the change with dose of these parameters is considered. The effect the variation of the capture and neutralization rates has on the spatial distribution of trapped holes is analyzed to better understanding radiation effects in MOS devices and also to contribute to the development of simplified numerical models capable of reproducing complex dynamics.
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