{"title":"一种厚膜半导体NO/sub /探测器","authors":"G. Ţelipan, E. Bodea, C. Petrescu, M. Motataianu","doi":"10.1109/SMICND.1997.651305","DOIUrl":null,"url":null,"abstract":"The paper presents a NO/sub x/ detector made by thick film technology. The two plated electrodes using a conductive Pd-Ag ink were deposited on one side of the alumina substrate. A thick-film heater material is pasted on the other side of the substrate the sensitive film, was produced, by a TiO/sub 2/-Al/sub 2/O/sub 3/ resistive ink. The device electrical resistance decrease from 200 K/spl Omega/ in pure air to 36 K/spl Omega/ in a 2000 ppm NO/sub x/ atmosphere for a working temperature of 450/spl deg/C.","PeriodicalId":144314,"journal":{"name":"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings","volume":"16 4","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-10-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A thick film semiconductor NO/sub x/ detector\",\"authors\":\"G. Ţelipan, E. Bodea, C. Petrescu, M. Motataianu\",\"doi\":\"10.1109/SMICND.1997.651305\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper presents a NO/sub x/ detector made by thick film technology. The two plated electrodes using a conductive Pd-Ag ink were deposited on one side of the alumina substrate. A thick-film heater material is pasted on the other side of the substrate the sensitive film, was produced, by a TiO/sub 2/-Al/sub 2/O/sub 3/ resistive ink. The device electrical resistance decrease from 200 K/spl Omega/ in pure air to 36 K/spl Omega/ in a 2000 ppm NO/sub x/ atmosphere for a working temperature of 450/spl deg/C.\",\"PeriodicalId\":144314,\"journal\":{\"name\":\"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings\",\"volume\":\"16 4\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-10-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.1997.651305\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.1997.651305","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The paper presents a NO/sub x/ detector made by thick film technology. The two plated electrodes using a conductive Pd-Ag ink were deposited on one side of the alumina substrate. A thick-film heater material is pasted on the other side of the substrate the sensitive film, was produced, by a TiO/sub 2/-Al/sub 2/O/sub 3/ resistive ink. The device electrical resistance decrease from 200 K/spl Omega/ in pure air to 36 K/spl Omega/ in a 2000 ppm NO/sub x/ atmosphere for a working temperature of 450/spl deg/C.
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