光电探测器响应中GeSn吸收系数的提取

Kaiheng Ye, Wogong Zhang, M. Oehme, M. Schmid, M. Gollhofer, K. Kostecki, D. Widmann, E. Kasper, J. Schulze
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引用次数: 0

摘要

锗锡(GeSn)使红外(IR)光探测器的光响应从锗探测器的典型截止波长1550nm转向中红外(MIR)[1]。GeSn的光学吸收系数的测定是一个难点,因为它既需要高质量的GeSn材料,又需要合适的测量结构。利用高质量的吸收材料GeSn制备了一系列垂直引脚光电探测器,实现了从光响应中定量提取吸收系数。本文介绍了垂直GeSn光电探测器的制作、本征区(i区)背景掺杂水平的测量和吸收系数的测定,并讨论了高掺杂接触层和内建电场的电吸收效应的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Extraction of GeSn absorption coefficients from photodetector response
Germanium tin (GeSn) shifts the photo-response of infrared (IR) light detectors from a typical cutoff wavelength of Ge detectors of 1550nm toward the mid infrared (MIR) [1]. The determination of the optical absorption coefficient of GeSn is difficult because it requires both high grade GeSn material and appropriate measurement structure. A series of vertical pin photodetector with the absorber material GeSn of excellent quality were fabricated achieving quantitative extraction of the absorption coefficient from photo-response. In this paper the fabrication of vertical GeSn photodetectors, the measurement of the background doping level in the intrinsic region (i-region) and the determination of the absorption coefficient are presented and the influence of high doped contact layers and electro-absorption effects from the built-in electric field are discussed.
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