嵌入式单模玻璃波导层电光电路板技术的研制

L. Brusberg, D. Manessis, M. Neitz, Beatrice Schild, H. Schroder, T. Tekin, K. Lang
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引用次数: 5

摘要

我们的研究目标是开发单模光电电路板,单模板对板可插拔连接器和单模芯片对板耦合接口到硅光子器件。本文提出了一种基于热银离子交换的单模玻璃波导工艺,用于制造低损耗玻璃波导板,这种玻璃波导板将被开发用于嵌入这种印刷电路板的核心层。在150mm的晶圆上制备了单模玻璃波导(SM-WGs),以表征不同的嵌入场景。在最佳情况下,层压前后的传输损耗均小于0.1 dB/cm (λ=1550 nm)。开发了一种适合于单模光电电路板制作的玻璃波导层和嵌入工艺。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of an electro-optical circuit board technology with embedded single-mode glass waveguide layer
The goal of our research is the development of a single-mode electro-optical circuit board, the single-mode board-to-board pluggable connector and the single-mode chip-to-board coupling interface to silicon photonic devices. In this paper, the single-mode glass waveguide process is presented based on thermal silver ion-exchange for fabrication of low loss glass waveguide panels that will be developed for embedding as core layer of such printed circuit board. The single-mode glass waveguides (SM-WGs) were fabricated on 150 mm wafer size for characterization of different embedding scenarios. In the best case the measured propagation loss before and after lamination is below 0.1 dB/cm (λ=1550 nm). A suitable glass waveguide layer and embedding process was developed that can be applied for single-mode electro-optical circuit board fabrication.
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