6自由度静电微机械臂

Proceedings IROS '91:IEEE/RSJ International Workshop on Intelligent Robots and Systems '91 Pub Date : 1991-11-03 DOI:10.1109/IROS.1991.174656

T. Fukuda, M. Fujiyoshi, K. Kosuge, F. Arai

{"title":"6自由度静电微机械臂","authors":"T. Fukuda, M. Fujiyoshi, K. Kosuge, F. Arai","doi":"10.1109/IROS.1991.174656","DOIUrl":null,"url":null,"abstract":"A new mechanism of an electrostatic micromanipulator which has 6 DOF is proposed. Its main features are summarized as follows. First, it can be constructed in a very compact form, since the actuator system is fabricated and assembled through the photoetching process. Second, it can move along three axes (6 DOF) and rotate around each axis, and has high resolution with no backlash. In the experiments, a movable range of 3.15 micron and a rotatable angle of 1.1*10/sup -2/ degree are attained with an applied voltage of 350 V. A simulation result for dynamics to estimate the motion of the micromanipulator is shown.<<ETX>>","PeriodicalId":388962,"journal":{"name":"Proceedings IROS '91:IEEE/RSJ International Workshop on Intelligent Robots and Systems '91","volume":"462 ","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1991-11-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Electrostatic micromanipulator with 6 DOF\",\"authors\":\"T. Fukuda, M. Fujiyoshi, K. Kosuge, F. Arai\",\"doi\":\"10.1109/IROS.1991.174656\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A new mechanism of an electrostatic micromanipulator which has 6 DOF is proposed. Its main features are summarized as follows. First, it can be constructed in a very compact form, since the actuator system is fabricated and assembled through the photoetching process. Second, it can move along three axes (6 DOF) and rotate around each axis, and has high resolution with no backlash. In the experiments, a movable range of 3.15 micron and a rotatable angle of 1.1*10/sup -2/ degree are attained with an applied voltage of 350 V. A simulation result for dynamics to estimate the motion of the micromanipulator is shown.<<ETX>>\",\"PeriodicalId\":388962,\"journal\":{\"name\":\"Proceedings IROS '91:IEEE/RSJ International Workshop on Intelligent Robots and Systems '91\",\"volume\":\"462 \",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1991-11-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings IROS '91:IEEE/RSJ International Workshop on Intelligent Robots and Systems '91\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IROS.1991.174656\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IROS '91:IEEE/RSJ International Workshop on Intelligent Robots and Systems '91","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IROS.1991.174656","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 3

摘要

提出了一种新的六自由度静电微机械臂机构。其主要特点总结如下。首先，它可以构造成一个非常紧凑的形式，因为执行器系统是通过光刻工艺制造和组装的。其次，它可以沿三轴(6自由度)移动，并绕每轴旋转，具有高分辨率，无间隙。实验中，在350 V电压下，可移动范围为3.15微米，可旋转角度为1.1*10/sup -2/度。给出了用于估计微机械臂运动的动力学仿真结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Electrostatic micromanipulator with 6 DOF

A new mechanism of an electrostatic micromanipulator which has 6 DOF is proposed. Its main features are summarized as follows. First, it can be constructed in a very compact form, since the actuator system is fabricated and assembled through the photoetching process. Second, it can move along three axes (6 DOF) and rotate around each axis, and has high resolution with no backlash. In the experiments, a movable range of 3.15 micron and a rotatable angle of 1.1*10/sup -2/ degree are attained with an applied voltage of 350 V. A simulation result for dynamics to estimate the motion of the micromanipulator is shown.<>

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Proceedings IROS '91:IEEE/RSJ International Workshop on Intelligent Robots and Systems '91

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