流程队列时间控制，是被动的还是主动的?

2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Pub Date : 2018-04-01 DOI:10.1109/ASMC.2018.8373185

Chienfan Yu, Laura Bauman, V. Jophlin-Gut, G. Oakley, Michael Carbonnell, Z. Sowinski, E. Sherwood, Katherine Hawkins, Ryan Kelly, Rebekah Sheraw

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引用次数: 0

摘要

过程队列时间控制是缺陷和工具利用之间的权衡。本文讨论了在我们晶圆厂的有源硅(RX)模块中发现的三个队列时间敏感案例，这使我们采取更主动的方法来实施队列时间控制。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Process queue time control, reactive or proactive?

Process queue time control is a trade-off between defect and tool utilization. Three cases of queue time sensitivity discovered in active silicon (RX) module in our fab are discussed in this paper which led us to take a more pro-active approach to impose queue time control.

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2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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