半导体制造实时调度系统中的下一队列算法

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) Pub Date : 2000-09-26 DOI:10.1109/ISSM.2000.993618

Ying-Jen Chen, G. Yu., Kuo-sung Huang, Ivan Wang

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引用次数: 6

摘要

本文首先给出了该系统的总体结构，然后描述了调度规则的设计逻辑。实时调度系统使作业人员的批量调度工作更加方便。在实时调度程序的实现中，提出了一种next队列算法。最后证明了该调度算法不仅提高了FAB利用率，而且缩短了周期时间。从1999年第二季度至今，实时调度系统的实施使周期时间不断缩短，工具利用率提高了7%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A next queue algorithm in real time dispatching system of semiconductor manufacturing

We demonstrate a next-queue rule in the real time dispatcher developed in MXIC FAB I. The outline of this system is presented first, then, the dispatching rule design logic is described. The real time dispatching system makes lot-dispatching work easy for operators. A next queue algorithm was developed in the implementation of the real time dispatcher. Finally, it has been proved that the dispatching algorithm not only improves FAB utilization but also reduces cycle time. Implementation of the real time dispatching system keeps reducing of cycle time and improves tool utilization by 7% from Q2 1999 to now.

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Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)

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