{"title":"静电微镜的三维自组装与驱动","authors":"E. Quevy, L. Buchaillot, P. Bigotte, D. Collard","doi":"10.1109/ESSDERC.2000.194802","DOIUrl":null,"url":null,"abstract":"3D Polysilicon micro-parts are self-assembled by beam buckling induced by integrated Scratch Drive Actuator (SDA). With this technique, 380*250 μm2 micro-mirror were lifted 90 μm above the substrate plane. The 3D shapes were permanently kept by 2 different ways: i) mechanical locking produced by integrated clips and ii) electric field induced stiction. Subsequent to the assembling, micro-mirrors are successfully actuated by biasing underneath buried electrodes. Controlled motion up to +/15 ̊ rotation was successfully obtained even for long term experiments. This paper reports for the first time on the actuation of permanent 3D self-assembled micro-mirror for beam steering application.","PeriodicalId":354721,"journal":{"name":"30th European Solid-State Device Research Conference","volume":"53 24","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"3D self-assembling and actuation of electrostatic micro-mirrors\",\"authors\":\"E. Quevy, L. Buchaillot, P. Bigotte, D. Collard\",\"doi\":\"10.1109/ESSDERC.2000.194802\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"3D Polysilicon micro-parts are self-assembled by beam buckling induced by integrated Scratch Drive Actuator (SDA). With this technique, 380*250 μm2 micro-mirror were lifted 90 μm above the substrate plane. The 3D shapes were permanently kept by 2 different ways: i) mechanical locking produced by integrated clips and ii) electric field induced stiction. Subsequent to the assembling, micro-mirrors are successfully actuated by biasing underneath buried electrodes. Controlled motion up to +/15 ̊ rotation was successfully obtained even for long term experiments. This paper reports for the first time on the actuation of permanent 3D self-assembled micro-mirror for beam steering application.\",\"PeriodicalId\":354721,\"journal\":{\"name\":\"30th European Solid-State Device Research Conference\",\"volume\":\"53 24\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"30th European Solid-State Device Research Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESSDERC.2000.194802\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"30th European Solid-State Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSDERC.2000.194802","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
3D self-assembling and actuation of electrostatic micro-mirrors
3D Polysilicon micro-parts are self-assembled by beam buckling induced by integrated Scratch Drive Actuator (SDA). With this technique, 380*250 μm2 micro-mirror were lifted 90 μm above the substrate plane. The 3D shapes were permanently kept by 2 different ways: i) mechanical locking produced by integrated clips and ii) electric field induced stiction. Subsequent to the assembling, micro-mirrors are successfully actuated by biasing underneath buried electrodes. Controlled motion up to +/15 ̊ rotation was successfully obtained even for long term experiments. This paper reports for the first time on the actuation of permanent 3D self-assembled micro-mirror for beam steering application.
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