Xiaokang Shi, Min Yu, Jun Yin, Guoyan Zhang, Ru Huang, Xing Zhang
{"title":"一种精确而有效的分析浅结形成中真实掺杂波动的方法","authors":"Xiaokang Shi, Min Yu, Jun Yin, Guoyan Zhang, Ru Huang, Xing Zhang","doi":"10.1109/IWJT.2004.1306865","DOIUrl":null,"url":null,"abstract":"The paper addresses a precise and efficient analytical method of realistic dopant fluctuations in shallow junction formation. To reach the analytical method, millions of simulations are finished, and data of simulation results are analyzed. The analytical function of the method is without any additional fitting parameters and can be used to calculate the standard deviation and normalized standard deviation at different depths of the shallow junctions. And some simulation results of characteristics variation of devices are also shown in this paper.","PeriodicalId":342825,"journal":{"name":"The Fourth International Workshop on Junction Technology, 2004. IWJT '04.","volume":"418 2","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A precise and efficient analytical method of realistic dopant fluctuations in shallow junction formation\",\"authors\":\"Xiaokang Shi, Min Yu, Jun Yin, Guoyan Zhang, Ru Huang, Xing Zhang\",\"doi\":\"10.1109/IWJT.2004.1306865\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper addresses a precise and efficient analytical method of realistic dopant fluctuations in shallow junction formation. To reach the analytical method, millions of simulations are finished, and data of simulation results are analyzed. The analytical function of the method is without any additional fitting parameters and can be used to calculate the standard deviation and normalized standard deviation at different depths of the shallow junctions. And some simulation results of characteristics variation of devices are also shown in this paper.\",\"PeriodicalId\":342825,\"journal\":{\"name\":\"The Fourth International Workshop on Junction Technology, 2004. IWJT '04.\",\"volume\":\"418 2\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-03-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The Fourth International Workshop on Junction Technology, 2004. IWJT '04.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IWJT.2004.1306865\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Fourth International Workshop on Junction Technology, 2004. IWJT '04.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IWJT.2004.1306865","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A precise and efficient analytical method of realistic dopant fluctuations in shallow junction formation
The paper addresses a precise and efficient analytical method of realistic dopant fluctuations in shallow junction formation. To reach the analytical method, millions of simulations are finished, and data of simulation results are analyzed. The analytical function of the method is without any additional fitting parameters and can be used to calculate the standard deviation and normalized standard deviation at different depths of the shallow junctions. And some simulation results of characteristics variation of devices are also shown in this paper.
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