微系统热流传感器测试结构温度分布的计算

2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials Pub Date : 2007-07-01 DOI:10.1109/SIBEDM.2007.4292929

S. V. Fomenko, R. P. Dikareva, O. V. Lobach

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引用次数: 0

摘要

本文介绍了微系统热通量传感器的测试结构。考虑了考虑输出参数计数和热流传感器灵敏度的温度分布计算方法。给出了传感器温度分布的数值模拟结果，并与解析计算结果进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Computation of Temperature Distribution into Test Structure of Microsystem Heat Flux Sensor

In the article the test structure of the microsystem heat flux sensor is presented. Computation methods of temperature distribution which allow counting output parameters and a sensitivity of the heat flux sensor are considered. Results of a numerical modeling and their comparison with an analytical computation of a temperature distribution in the sensor are given.

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2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials

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