High-Performance Indium–Tin Oxide (ITO) Electrode Enabled by a Counteranion-Free Metal–Polymer Complex

IF 4.8 Q2 NANOSCIENCE & NANOTECHNOLOGY

ACS Nanoscience Au Pub Date : 2022-08-31 DOI:10.1021/acsnanoscienceau.2c00027

Gyeongbae Park, Dongbeom Kim, Geonwoo Kim and Unyong Jeong*,

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引用次数: 3

Abstract

Although multicomponent inorganic thin films (metal-oxides, -carbides, -nitrides, and -chalcogenides) have been synthesized by polymer-assisted deposition (PAD), synthesis of high-performance transparent conducting oxides (TCOs) has been rarely reported. TCO requires (i) removal of impurities, (ii) high-density oxide film, (iii) homogeneity in crystal structures and film morphology, and (iv) controllable elemental doping. This study performs a systematic investigation on preparation of stable multicomponent metal–polymer complex solutions by removing the counteranions in the solution. This study also proposes accurate acid–base titration for each metal species in order to minimize the amount of PEI, thus maximizing the density of the film. As a representative TCO, Sn-doped In₂O₃ (ITO) films have been achieved. The ITO film has an excellent sheet resistance (24.5 Ω/sq) at 93% optical transparency, with a figure of merit of 2.1 × 10^–2 Ω^–1, which is comparable to the best.

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由无反阴离子金属-聚合物络合物实现的高性能氧化铟锡(ITO)电极

虽然多组分无机薄膜(金属氧化物、-碳化物、-氮化物和-硫族化物)已经通过聚合物辅助沉积(PAD)合成，但合成高性能透明导电氧化物(TCOs)的报道很少。TCO要求(i)去除杂质，(ii)高密度氧化膜，(iii)晶体结构和膜形态的均匀性，以及(iv)可控的元素掺杂。本研究对通过去除溶液中的反阴离子制备稳定的多组分金属-聚合物配合物溶液进行了系统的研究。本研究还建议对每种金属进行精确的酸碱滴定，以尽量减少PEI的量，从而最大限度地提高膜的密度。作为TCO的代表，已经实现了掺杂sn的In2O3 (ITO)薄膜。在93%的光学透明度下，ITO薄膜具有优异的片电阻(24.5 Ω/sq)，其优点系数为2.1 × 10-2 Ω-1，与最佳相媲美。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

ACS Nanoscience Au 材料科学、纳米科学-

CiteScore

4.20

自引率

0.00%

发文量

期刊介绍： ACS Nanoscience Au is an open access journal that publishes original fundamental and applied research on nanoscience and nanotechnology research at the interfaces of chemistry biology medicine materials science physics and engineering.The journal publishes short letters comprehensive articles reviews and perspectives on all aspects of nanoscience and nanotechnology:synthesis assembly characterization theory modeling and simulation of nanostructures nanomaterials and nanoscale devicesdesign fabrication and applications of organic inorganic polymer hybrid and biological nanostructuresexperimental and theoretical studies of nanoscale chemical physical and biological phenomenamethods and tools for nanoscience and nanotechnologyself- and directed-assemblyzero- one- and two-dimensional materialsnanostructures and nano-engineered devices with advanced performancenanobiotechnologynanomedicine and nanotoxicologyACS Nanoscience Au also publishes original experimental and theoretical research of an applied nature that integrates knowledge in the areas of materials engineering physics bioscience and chemistry into important applications of nanomaterials.