Reliability Study of Copper Pillar Bump Interconnects for Acoustic Wave - Wafer Level Package

J. Schober, K. Nicolaus, G. Feiertag
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引用次数: 1

Abstract

Replacing solder ball interconnects through copper pillar bump (CPB) interconnects on acoustic wave components (AWC) like SAW (surface acoustic wave) filters saves valuable chip space and facilitates chip miniaturization. In this contribution, we present our very first assembly and reliability results for CPBs on lithium niobate chips with TFAP(tm) (Thin Film Acoustic Package) for SAW filters. The CPBs consist of a Cu/Ni/SnAg layer stack and are soldered on a test board with Cu/Ni/Au finish. Leaving aside premature failures due to poor soldering, CPBs withstand 770 cycles of RCoT (Rapid Change of Temperatur, −40°C / + 125°C) reliability testing. The solder joints were investigated via cross section micrographs. Additionally, uHAST (Accelerated Moisture Resistance - unbiased HAST), DH (Dry Heat) and DHSS (Damp Heat Steady State) reliability tests were performed.
声波-晶圆级封装铜柱凸点互连可靠性研究
通过SAW(表面声波)滤波器等声波组件(AWC)上的铜柱凸点(CPB)互连取代锡球互连,节省了宝贵的芯片空间,并促进了芯片的小型化。在这篇文章中,我们展示了我们在带有TFAP(薄膜声学封装)的铌酸锂芯片上的cpb的第一个组装和可靠性结果。cpb由Cu/Ni/SnAg层堆叠组成,并焊接在Cu/Ni/Au表面的测试板上。不考虑焊接不良导致的过早失效,cpb可承受770次RCoT(快速温度变化,−40°C / + 125°C)可靠性测试。通过横截面显微照片对焊点进行了研究。此外,还进行了uHAST(加速抗湿性-无偏HAST)、DH(干热)和DHSS(湿热稳态)可靠性测试。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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