High performance solution-processed thin-film transistors based on In2O3 nanocrystals

S. Swisher, S. Volkman, K. Braam, Jaewon Jang, V. Subramanian
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Abstract

Metal-oxide semiconductors have received a great deal of focus in recent years as a means of realizing transparent electronics for next generation display applications; such materials are expected to enable the realization of transparent pixel transistors for display that do not block light, enabling realization of brighter displays with higher aperture ratio. In recent years, the demonstration of amorphous thin films of transition metal oxides with mobility an order of magnitude greater than that of amorphous silicon has resulted in dramatic interest and rapid advances in the field. In particular, solution processable routes are considered particularly attractive since they may allow for low-cost fabrication techniques based on printing. There have been various reports of sol-gel based approaches to printable electronics based on these systems; however, an approach utilizing colloidal semiconductor nanocrystals has several distinct advantages. First, the high temperature required for crystal nucleation and growth can occur during the synthesis phase, thus decoupling the high temperature crystallization step from the processing constraints of the substrate. Second, and possibly even more importantly, using nanocrystals as the starting point for inorganic semiconducting inks may provide better control over the stoichiometry of the material, more consistent film composition, and a pathway towards controlled doping of the channel material. Here we report a synthesis of indium oxide nanocrystals, and the fabrication conditions that result in high-performance TFTs based on the same.
基于In2O3纳米晶体的高性能溶液加工薄膜晶体管
近年来,金属氧化物半导体作为实现下一代显示应用的透明电子器件的一种手段受到了极大的关注;该材料有望实现用于显示的不遮挡光线的透明像素晶体管,从而实现具有更高孔径比的更亮的显示。近年来,迁移率比非晶硅高一个数量级的过渡金属氧化物非晶薄膜的研究引起了人们的极大兴趣,并在该领域取得了迅速的进展。特别是,溶液可加工路线被认为特别有吸引力,因为它们可能允许基于印刷的低成本制造技术。有各种基于这些系统的基于溶胶-凝胶的可印刷电子方法的报告;然而,利用胶体半导体纳米晶体的方法有几个明显的优点。首先,晶体成核和生长所需的高温可以发生在合成阶段,从而将高温结晶步骤与衬底的加工约束解耦。其次,可能更重要的是,使用纳米晶体作为无机半导体油墨的起点可以更好地控制材料的化学计量,更一致的薄膜组成,以及控制通道材料掺杂的途径。本文报道了氧化铟纳米晶体的合成,以及在此基础上制备高性能tft的制备条件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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