Characteristics Study of Silicon Nanoparticles Produced by Physical Vapour Deposition

Abstract

SiliconNanoparticles with thickness ranging between 40 to 50 nm and an average diameter of 80 nm were prepared by Physical Vapour Deposition (electron beam). The Nanoparticles showed blue and visible light emission from 300 A o to 900 A o , with peak intensity at 350-700 A o .Also AFM measurements were carried out and the regularity of silicon Nanoparticles was calculated and found to be equal to 0.3858 according to a quantitative hexagonal regularity calculation.