Jeong-Il Park, Jong-Hwa Park, K. Shin, Jin-Woo Kim, Young-Jong Lee, H. Chung
{"title":"The characteristics of holographic grating in chalcogenide thin films","authors":"Jeong-Il Park, Jong-Hwa Park, K. Shin, Jin-Woo Kim, Young-Jong Lee, H. Chung","doi":"10.1109/ISEIM.2001.973589","DOIUrl":null,"url":null,"abstract":"We have investigated the polarization dependence of holographic gratings in chalcogenide Se/sub 75/Ge/sub 25/ and As/sub 40/Ge/sub 10/Se/sub 15/S/sub 35/ thin films. The films have been irradiated using a linearly polarized He-Ne laser at 633 nm. To observe the etching characteristic, the films have been etched with NaOH solution. Film thicknesses were about 1 /spl mu/m and 3 /spl mu/m, and were monitored with a quartz oscillator during deposition and measured with the NKT1200 analyzer. A self-relief grating was formed in As/sub 40/Ge/sub 10/Se/sub 15/S/sub 35/ thin film.","PeriodicalId":71964,"journal":{"name":"装备机械","volume":"40 1","pages":"145-147"},"PeriodicalIF":0.0000,"publicationDate":"2001-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"装备机械","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1109/ISEIM.2001.973589","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We have investigated the polarization dependence of holographic gratings in chalcogenide Se/sub 75/Ge/sub 25/ and As/sub 40/Ge/sub 10/Se/sub 15/S/sub 35/ thin films. The films have been irradiated using a linearly polarized He-Ne laser at 633 nm. To observe the etching characteristic, the films have been etched with NaOH solution. Film thicknesses were about 1 /spl mu/m and 3 /spl mu/m, and were monitored with a quartz oscillator during deposition and measured with the NKT1200 analyzer. A self-relief grating was formed in As/sub 40/Ge/sub 10/Se/sub 15/S/sub 35/ thin film.