Fabrication of carbon nanomaterials using pulse microplasma in SEM

Abstract

Synthesis of carbon nanomaterials by pulse microplasma in the chamber of a scanning electron microscope equipped with a special discharge cell is reported. The peak current density of the methane microplasma was higher than 5 kA cm−2, and the pulse width was almost 10 ns. After 5 s operation, there could be observed some carbon nanomaterials deposited on the cathode of the platinum film besides melted spots.