Changhyun Kim, Suhyeong Lee, J. Moon, Joonhyeon Kim, Hunhee Lee, Hongjeon Kang, Hyun Woo Kim, Jaeyeong Heo, H. Kim
{"title":"The Effect of Reduced Oxidation Process Using Ammonia Annealing and Deposited Oxides on 4H-SiC Metal-Oxide-Semiconductor Structure","authors":"Changhyun Kim, Suhyeong Lee, J. Moon, Joonhyeon Kim, Hunhee Lee, Hongjeon Kang, Hyun Woo Kim, Jaeyeong Heo, H. Kim","doi":"10.1149/2.0021509SSL","DOIUrl":null,"url":null,"abstract":"aDepartment of Material Science and Engineering, College of Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea bCenter for Energy Efficient Semiconductors, Korea Electrotechnology Research Institute, Changwon, Gyungnam 641-120, Korea cDepartment of Materials Science and Engineering, and Optoelectronics Convergence Research Center, Chonnam National University, Gwangju 500-757, Korea","PeriodicalId":11423,"journal":{"name":"ECS Solid State Letters","volume":"80 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2015-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ECS Solid State Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1149/2.0021509SSL","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
aDepartment of Material Science and Engineering, College of Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea bCenter for Energy Efficient Semiconductors, Korea Electrotechnology Research Institute, Changwon, Gyungnam 641-120, Korea cDepartment of Materials Science and Engineering, and Optoelectronics Convergence Research Center, Chonnam National University, Gwangju 500-757, Korea
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