Design of A Novel Piezoelectric Actuated Two-Degree-of-freedom Compliant Stage

Abstract

this paper proposes a novel piezoelectric actuated (PEA) two-degree-of-freedom (2-DOF) compliant stage. Firstly, the stage’s structure is introduced. The stage have mirror symmetry about the YZ-plane. It mainly consists of a Scott-Russell (SR) mechanism, a leverage mechanism, and a U-shaped flexure hinge (UFH) mechanism. The input end of the UFH mechanism can be guided by the parallelogram guidance mechanism. And a rotational constraint of the UFH mechanism can be obtained. Hence the undesirable parasitic rotational motions and the coupling motion of UFH mechanism can be eliminated. Secondly, the analytical model of the compliant stage is established by considering all the connecting linkages as flexible components. Finally, by finite element analysis (FEA), the amplification ratio and the natural frequencies of the stage are estimated. The FEA results show that the stage has good performance.