Route to batch-compatible fabrication of nanotweezers by guided self-assembly

Abstract

Fabrication of integrated micro and nanoscale components in a single batch is one of the biggest challenges for nanosystems development. A self-assembly technique that enables "batch-compatible" integration of micro electro mechanical systems with nanoribbons is presented by demonstrating electrostatically actuated comb drive microgrippers with nanoribbon end-effectors. Preliminary fabrication results demonstrate the possibility of obtaining well defined spatial density and orientation of nanoribbons matching the precision of top-down techniques and at the same time allowing complete alignment and registry with subsequent lithography steps.