Hybrid and heterogeneous photonic integrated near-infrared InGaAs/InAlAs single-photon avalanche diode

IF 5.6 2区物理与天体物理 Q1 PHYSICS, MULTIDISCIPLINARY

Quantum Science and Technology Pub Date : 2023-01-30 DOI:10.1088/2058-9565/acb730

Jishen Zhang, Haiwen Xu, Gong Zhang, Yue Chen, Haibo Wang, K. Tan, S. Wicaksono, Chen Sun, Qiwen Kong, Chao Wang, Charles Ci Wen Lim, S. Yoon, Xiao Gong

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引用次数: 0

Abstract

We have demonstrated the integrated indium gallium arsenide/indium aluminum arsenide (InGaAs/InAlAs) single-photon avalanche diodes (SPAD) with silicon (Si) waveguides and grating couplers on the Silicon-on-insulator substrate. A vertical coupling scheme is adopted which allows the use of a thick bonding interlayer for high yield. The epoxy ‘SU-8’ is selected to be the adhesion layer with a low transmission loss, low volumetric shrinkage, and low curing temperature. In addition, both hybrid and heterogeneous integration schemes are realized which are compatible with the current multi-project wafer process. Extensive performance characterization is carried out while the results are compared. Our hybrid integrated SPAD exhibits high photon detection efficiency (PDE) of ∼21% and a relatively low dark count rate (DCR) of 8.6 × 105 Hz, which are among the best performance reported for InGaAs/InAlAs SPADs while the heterogeneous integrated SPAD shows a decent PDE of 6% with a DCR of 2 × 107 Hz. Combined with the inherent wide applicability of the bonding using the SU-8 layer, this photonic integration provides a promising solution for large-scale quantum information with various material systems.

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杂化和非均质光子集成近红外InGaAs/InAlAs单光子雪崩二极管

我们展示了集成的砷化铟镓/砷化铟铝(InGaAs/InAlAs)单光子雪崩二极管(SPAD)与硅(Si)波导和光栅耦合器在硅-绝缘体衬底上。采用垂直耦合方案，允许使用厚粘合中间层以获得高成品率。选择具有低传输损耗、低体积收缩率、低固化温度的环氧树脂“SU-8”作为粘结层。此外，还实现了与当前多项目晶圆工艺兼容的混合和异构集成方案。在对结果进行比较的同时，进行了广泛的性能表征。我们的混合集成SPAD具有高达21%的光子探测效率(PDE)和8.6 × 105 Hz的相对较低的暗计数率(DCR)，这是InGaAs/InAlAs SPAD的最佳性能之一，而异构集成SPAD的PDE为6%，DCR为2 × 107 Hz。结合SU-8层键合固有的广泛适用性，这种光子集成为各种材料系统的大规模量子信息提供了一种有前途的解决方案。

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来源期刊

Quantum Science and Technology Materials Science-Materials Science (miscellaneous)

CiteScore

11.20

自引率

3.00%

发文量

133

期刊介绍： Driven by advances in technology and experimental capability, the last decade has seen the emergence of quantum technology: a new praxis for controlling the quantum world. It is now possible to engineer complex, multi-component systems that merge the once distinct fields of quantum optics and condensed matter physics. Quantum Science and Technology is a new multidisciplinary, electronic-only journal, devoted to publishing research of the highest quality and impact covering theoretical and experimental advances in the fundamental science and application of all quantum-enabled technologies.