A novel test structure for measuring the threshold voltage variance in MOSFETs

Abstract

A new threshold voltage variation monitoring circuit is introduced which utilizes a stochastic comparator group. It occupies minimal area, only requires a DC input stimulus voltage, and performs digital DC measurement. Traditional methods have required the measurement of the variation in a ring oscillator frequency. Our method circumvents the need for AC measurements, and accelerates the accumulation of data by incorporating stochastic properties into the circuit.