L. Ghimpu, I. Tiginyanu, V. Ursaki, O. Lupan, L. Chow, Y. Rudzevich, Yuqing Lin
{"title":"Optical and sensory properties of ZnO nanofibrous layers grown by magnetron sputtering","authors":"L. Ghimpu, I. Tiginyanu, V. Ursaki, O. Lupan, L. Chow, Y. Rudzevich, Yuqing Lin","doi":"10.1109/SMICND.2012.6400674","DOIUrl":null,"url":null,"abstract":"This paper presents optical and sensory properties of ZnO nanofirous layers grown by a cost-effective and fast fabrication method based on magnetron sputtering. The as-prepared nanofibrous layers show good conductive properties which are of interest for gas sensing structures. Their application for hydrogen detection is demonstrated in premiere, and the developed H2 sensor structure exhibits good response / recovery behavior under ultraviolet (UV) light, and good sensitivity. This method is cost-effective and facile and has a great potential for various sensorial applications.","PeriodicalId":9628,"journal":{"name":"CAS 2012 (International Semiconductor Conference)","volume":"36 1","pages":"139-142"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS 2012 (International Semiconductor Conference)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2012.6400674","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
This paper presents optical and sensory properties of ZnO nanofirous layers grown by a cost-effective and fast fabrication method based on magnetron sputtering. The as-prepared nanofibrous layers show good conductive properties which are of interest for gas sensing structures. Their application for hydrogen detection is demonstrated in premiere, and the developed H2 sensor structure exhibits good response / recovery behavior under ultraviolet (UV) light, and good sensitivity. This method is cost-effective and facile and has a great potential for various sensorial applications.