P.D. Dapkus, S.P. DenBaars, Q. Chen, W.G. Jeong, B.Y. Maa
{"title":"The role of surface and gas phase reactions in atomic layer epitaxy","authors":"P.D. Dapkus, S.P. DenBaars, Q. Chen, W.G. Jeong, B.Y. Maa","doi":"10.1016/0146-3535(89)90019-1","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":101046,"journal":{"name":"Progress in Crystal Growth and Characterization","volume":"19 1","pages":"Pages 137-147"},"PeriodicalIF":0.0000,"publicationDate":"1989-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0146-3535(89)90019-1","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Progress in Crystal Growth and Characterization","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0146353589900191","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}