A large gap of Ar and mixed gas at atmospheric pressure RF-DBD glow discharges

B. Li, Q. Chen, Z. Liu, Z. Wang
{"title":"A large gap of Ar and mixed gas at atmospheric pressure RF-DBD glow discharges","authors":"B. Li, Q. Chen, Z. Liu, Z. Wang","doi":"10.1109/INEC.2010.5424652","DOIUrl":null,"url":null,"abstract":"In this study, a large gap of the distance between electrodes (≫5.5 mm) of Ar atmospheric pressure glow discharge (APGD) in radio frequency dielectric barrier discharges (RF-DBD) is achieved. The I-V characteristic and I-phase angle characteristic of RF-DBD are studied in detail. The discharge characteristic of Ar mixed with N2, O2 and Air, respectively, was diagnosed by the optical emission spectrum. The Lissajous plot was measured to calculate the effective power of the discharges. It is obtained that the mixture gas ratio in RF-DBD is seriously affected the discharge stability and the discharge mode. It concludes that this adjustable manufacture of the RF-DBD is capable in wide applications for material modifications and polymerizations.","PeriodicalId":6390,"journal":{"name":"2010 3rd International Nanoelectronics Conference (INEC)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2010-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 3rd International Nanoelectronics Conference (INEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INEC.2010.5424652","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

In this study, a large gap of the distance between electrodes (≫5.5 mm) of Ar atmospheric pressure glow discharge (APGD) in radio frequency dielectric barrier discharges (RF-DBD) is achieved. The I-V characteristic and I-phase angle characteristic of RF-DBD are studied in detail. The discharge characteristic of Ar mixed with N2, O2 and Air, respectively, was diagnosed by the optical emission spectrum. The Lissajous plot was measured to calculate the effective power of the discharges. It is obtained that the mixture gas ratio in RF-DBD is seriously affected the discharge stability and the discharge mode. It concludes that this adjustable manufacture of the RF-DBD is capable in wide applications for material modifications and polymerizations.
氩气和混合气体在常压下有较大的间隙,RF-DBD辉光放电
本研究实现了射频介质阻挡放电(RF-DBD)中氩大气压辉光放电(APGD)的电极间距较大(< 5.5 mm)。详细研究了射频dbd的I-V特性和i相角特性。利用发射光谱分析了Ar分别与N2、O2和Air混合后的放电特性。测量了利萨尤曲线以计算放电的有效功率。研究结果表明,RF-DBD的混合气比严重影响放电稳定性和放电方式。结果表明,这种可调节的RF-DBD在材料改性和聚合方面具有广泛的应用前景。
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