Simulation Research on Integrated Shadow Mask in Fabrication of OLED Displays

Abstract

Evaporation of organic light-emitting materials is a crucial link in the OLED display manufacturing process. Integrated shadow mask is one of the key components that determine the quality of the vapor-deposited organic light-emitting materials. It has high processing accuracy, complicated manufacturing process, and high cost. Once the mask deforms and fails, it will seriously affect the quality of OLED displays and even produce waste products. The precision of the evaporation mask will directly affect the quality of evaporation products. Among them, there are normally three major parameters, including the thickness of evaporation mask plate, the number of evaporation orifice plates and the width of support structure. In this paper, we use Comsol to simulate the deformation of evaporation mask, and analyze the influence of thickness of evaporation mask, number of evaporation orifices and width of the support structure. The simulation results are compared to reported reults of the vapor deposition mask to verify the precision and provide reliable technical support for the optimization of the vapor deposition mask structure.