Relation between hot-carrier light emission and kink effect in poly-Si thin film transistors

M. Koyanagi, H. Kurino, T. Hashimoto, H. Mori, K. Hata, Y. Hiruma, T. Fujimori, I. Wu, A. Lewis
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引用次数: 12

Abstract

The kink effect in poly-Si TFTs (thin-film transistors) is evaluated by using a novel method based on kink current and hot carrier light emission measurements. It is revealed by examining the influence of the hydrogenation treatment on the kink current and measuring the temperature dependence of the kink current that the kink effect is significantly influenced by the grain boundary traps. Furthermore, it is found from the hot carrier light emission measurement that the energy distribution of hot carriers is not described by the Maxwell-Boltzmann distribution. The comparison between the kink current and the emitted light intensity suggests that both kink current and light emission basically originated from the hot carriers although the kink current characteristics are not always completely correlated with the light emission properties.<>
多晶硅薄膜晶体管中热载子发光与扭结效应的关系
采用一种基于扭结电流和热载流子发光测量的新方法,对多晶硅薄膜晶体管中的扭结效应进行了评价。是显示通过检查的影响上的加氢处理扭结电流和测量的温度依赖性的扭结电流扭结效果显著受到晶界的陷阱。此外,从热载流子光发射测量中发现,热载流子的能量分布不符合麦克斯韦-玻尔兹曼分布。扭结电流之间的比较和发射光强度表明扭结电流和光发射基本上源于热运营商虽然扭结当前特征并不总是完全与光发射特性。>
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