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Feature Vectors Based on Wire Width and Distance for Lithography Hotspot Detection

Q4 Engineering
IPSJ Transactions on System LSI Design Methodology Pub Date : 2023-01-01 DOI:10.2197/ipsjtsldm.16.2
Gaku Kataoka, M. Yamamoto, Masato Inagi, Shinobu Nagayama, S. Wakabayashi
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基于线宽和距离的光刻热点检测特征向量
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来源期刊
IPSJ Transactions on System LSI Design Methodology
IPSJ Transactions on System LSI Design Methodology Engineering-Electrical and Electronic Engineering
CiteScore
1.20
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