Half-threshold bias Ioff reduction down to nA range of thermally and electrically stable high-performance integrated OTS selector, obtained by Se enrichment and N-doping of thin GeSe layers

N. S. Avasarala, G. Donadio, T. Witters, K. Opsomer, B. Govoreanu, A. Fantini, S. Clima, H. Oh, S. Kundu, W. Devulder, M. H. van der Veen, J. van Houdt, M. Heyns, L. Goux, G. Kar
{"title":"Half-threshold bias Ioff reduction down to nA range of thermally and electrically stable high-performance integrated OTS selector, obtained by Se enrichment and N-doping of thin GeSe layers","authors":"N. S. Avasarala, G. Donadio, T. Witters, K. Opsomer, B. Govoreanu, A. Fantini, S. Clima, H. Oh, S. Kundu, W. Devulder, M. H. van der Veen, J. van Houdt, M. Heyns, L. Goux, G. Kar","doi":"10.1109/VLSIT.2018.8510680","DOIUrl":null,"url":null,"abstract":"We report on the reduction of leakage current at half threshold bias (I<inf>off1/2</inf>) down to the 1nA range achieved using Se-enriched or N-doped GeSe. Integrated 50nm OTS devices demonstrated excellent thermal stability up to 600°C, as well as electrical stability (V<inf>th</inf>, I<inf>off1/2</inf>) when operated at a high on current density of 23MA/cm<sup>2</sup> for 10<sup>8</sup> cycles.","PeriodicalId":6561,"journal":{"name":"2018 IEEE Symposium on VLSI Technology","volume":"6 1","pages":"209-210"},"PeriodicalIF":0.0000,"publicationDate":"2018-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"19","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Symposium on VLSI Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIT.2018.8510680","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 19

Abstract

We report on the reduction of leakage current at half threshold bias (Ioff1/2) down to the 1nA range achieved using Se-enriched or N-doped GeSe. Integrated 50nm OTS devices demonstrated excellent thermal stability up to 600°C, as well as electrical stability (Vth, Ioff1/2) when operated at a high on current density of 23MA/cm2 for 108 cycles.
通过对GeSe薄层进行Se富集和n掺杂,获得了热稳定和电稳定的高性能集成OTS选择器的半阈值偏置off降至nA范围
我们报告了使用富硒或掺n的GeSe可以将半阈值偏压(Ioff1/2)下的泄漏电流降低到1nA范围。集成的50nm OTS器件在高达600°C的温度下表现出优异的热稳定性,以及在23MA/cm2的高电流密度下108次循环时的电气稳定性(Vth, Ioff1/2)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信