Development of a Compact XYZ Nanopositioner Supporting Optical Scanning

2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2018-08-01 DOI:10.1109/3M-NANO.2018.8552171

Yue Wang, Peng Yan

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引用次数: 3

Abstract

In this paper we consider the design, analysis and experimental validations of an XYZ PZT driven nano-positioning stage to support high precision optical scanning systems. The overall motion stage consists of a parallel XY-nanopositioner and a Z-axis nanopositioner mounted in series on the XY stage. To achieve fast and high precision motions with loads from the optical systems, a novel hollow structural design is proposed, where the flexure based mechanism is further optimized to increase the output displacement while ensuring a relatively high natural frequency. Then the static model of the stage is developed for the lever and guiding mechanisms and its accuracy is verified by FEA(Finite Element Analysis). The proposed 3-DOF(Degree of Freedom) nanopositioner is manufactured and experimentally investigated. Experimental tests show that the nanopositioner has natural frequencies of 855 Hz, 865 Hz and 1019 Hz for X, Y and Z axes, respectively. Meanwhile the maximum travel ranges of 71 μm, 71 μm and 52 μm are obtained along x, y and z directions, which demonstrate large strokes and relatively high natural frequencies for the 3-DOF optical nanopositioner.

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支持光学扫描的紧凑XYZ纳米对位器的开发

在本文中，我们考虑了XYZ PZT驱动的纳米定位平台的设计，分析和实验验证，以支持高精度光学扫描系统。整个运动平台由一个平行的x -轴纳米对姿器和一个串联安装在XY平台上的z -轴纳米对姿器组成。为了在光学系统载荷下实现快速、高精度的运动，提出了一种新颖的中空结构设计，其中对基于柔性的机构进行了进一步优化，以增加输出位移，同时保证相对较高的固有频率。在此基础上，建立了连杆机构和导向机构的台架静态模型，并通过有限元分析验证了模型的准确性。制备了该三自由度纳米反位剂并进行了实验研究。实验结果表明，该纳米电磁铁在X、Y和Z轴上的固有频率分别为855 Hz、865 Hz和1019 Hz。在x、y和z方向上的最大行程分别为71 μm、71 μm和52 μm，表明该三自由度光学纳米对位器具有较大的行程和较高的固有频率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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