{"title":"Instability in low energy beams extracted from BF3 plasma","authors":"Y. Inouchi, Takeshi Matsumoto, S. Dohi, M. Naito","doi":"10.1109/IIT.2014.6940040","DOIUrl":null,"url":null,"abstract":"Ion beam instabilities on a wide ribbon beam which cross-section is 150 cm × 10 cm are discussed. At low energy conditions, we detected two kinds of instabilities on the ion beam extracted from BF<sub>3</sub> plasmas. One kind of the instabilities is that onset of the instability is dependent on the extraction current from the ion source. This instability occurred when the extraction current exceeded 300 - 350 mA at the energy of 15keV. Another is that the onset is dependent on the BF<sub>2</sub><sup>+</sup> beam current. The BF<sub>2</sub><sup>+</sup> beam current became unstable when it exceeded about 20 μA/cm<sup>2</sup> at 15keV. Energy dependence of these instabilities is also discussed.","PeriodicalId":6548,"journal":{"name":"2014 20th International Conference on Ion Implantation Technology (IIT)","volume":"116 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 20th International Conference on Ion Implantation Technology (IIT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IIT.2014.6940040","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Ion beam instabilities on a wide ribbon beam which cross-section is 150 cm × 10 cm are discussed. At low energy conditions, we detected two kinds of instabilities on the ion beam extracted from BF3 plasmas. One kind of the instabilities is that onset of the instability is dependent on the extraction current from the ion source. This instability occurred when the extraction current exceeded 300 - 350 mA at the energy of 15keV. Another is that the onset is dependent on the BF2+ beam current. The BF2+ beam current became unstable when it exceeded about 20 μA/cm2 at 15keV. Energy dependence of these instabilities is also discussed.