{"title":"吸引プラズマエッチング法を用いたSiO 2 ダイアフラム構造作製技術の開発;吸引プラズマエッチング法を用いたSiO 2 ダイアフラム構造作製技術の開発;Development of Simple Fabrication Method of SiO 2 Diaphragm Using Inward Plasma Etching","authors":"Ryo Kanou, Hiroshi Suga, Shun'ichiro Shimbori, Satoshi Takahashi, Toshitaka Kubo, Atsushi Ando, Tetsuo Shimizu, Junko Miyawaki","doi":"10.3131/JVSJ2.60.148","DOIUrl":null,"url":null,"abstract":"Development of Simple Fabrication Method of SiO2 Diaphragm Using Inward Plasma Etching Ryo KANOU1,3, Hiroshi SUGA1, Shun'ichiro SHIMBORI2, Satoshi TAKAHASHI2, Toshitaka KUBO3, Atsushi ANDO3, Tetsuo SHIMIZU3 and Jun MIYAWAKI3 1Department of Engineering, Chiba Institute of Technology, 2171 Tsudanuma, Narashino-shi, Chiba 2750016, Japan 2Sanyu Co., Ltd., 2434 Ishinazaka-cho, Hitachi-shi, Ibaraki 3191225, Japan 3National Institute of Advanced Industrial Science and Technology, 111 Higashi, Tsukuba-shi, Ibaraki 3058565, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"25 2 1","pages":"148-152"},"PeriodicalIF":0.0000,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The Vacuum Society of Japan","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3131/JVSJ2.60.148","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Development of Simple Fabrication Method of SiO2 Diaphragm Using Inward Plasma Etching Ryo KANOU1,3, Hiroshi SUGA1, Shun'ichiro SHIMBORI2, Satoshi TAKAHASHI2, Toshitaka KUBO3, Atsushi ANDO3, Tetsuo SHIMIZU3 and Jun MIYAWAKI3 1Department of Engineering, Chiba Institute of Technology, 2171 Tsudanuma, Narashino-shi, Chiba 2750016, Japan 2Sanyu Co., Ltd., 2434 Ishinazaka-cho, Hitachi-shi, Ibaraki 3191225, Japan 3National Institute of Advanced Industrial Science and Technology, 111 Higashi, Tsukuba-shi, Ibaraki 3058565, Japan
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