Processing and structure-property relationships for fine grained PZT ceramics

Abstract

Submicron grain sized PZT-5A ceramics have been produced with properties comparable to conventional coarse grained material. The degradation in dielectric and piezoelectric properties with decreasing grain size was compensated with a new dopant strategy. This made the materials piezoelectrically softer compensating for reductions in poling efficiency. The submicron grain sized material has been shown to be superior to coarse grained ceramic during fine scale dicing operations.